• Genuine OEM Parts – TOKYO ELECTRON

    TOKYO ELECTRON Spare Parts & Spare Parts – Worldwide Supplier

    Kontek Marine supports Tokyo Electron tools worldwide — process-tool spares and sub-assemblies for fabs across the globe.

    OEM Spares Service Kits Controls & Parts Genuine OEM Parts

    TOKYO ELECTRON — Global Spare Parts Supplier

    Tokyo Electron process tools build semiconductors — coaters, etchers and deposition with exacting spares demand. Kontek Marine sources high-tech equipment spares for fab support services.

    Send us your equipment references — we confirm availability, source genuine spares with worldwide delivery, and support selection.

    TOKYO ELECTRON spare parts
    Representative range of commonly requested TOKYO ELECTRON references below. For exact part numbers, send your BOM or equipment model to sales@kontekmarine.com for an instant quote with worldwide delivery.
    Sr. No.Product NameModel / Part No.Description
    1Pump Service Kit—Dry pump kit
    2Seal Ring Set—Chamber seals
    3Showerhead Assembly—Gas distribution plate
    4Heater Element—Pedestal heater
    5Sensor Module—Process sensor
    6Valve Assembly—Slit/isolation valve
    7Filter Element—Process filter
    8Cable Harness—Tool cabling